Dry etching methods are all anisotropic processes ... This can become a problem; if the process is not tightly controlled, the etching reactions can extend underneath the resist layer masking ...

(Image: A*STAR Institute of Materials Research and Engineering) Wet etching can be classified into two main types based on the etching mechanism and the resulting profile: It's worth noting that wet ...

These modules are ideal for research and production customers, providing a controlled environment that enhances process repeatability with load-lock and cassette-to-cassette options. Reactive Ion Etch ...