Abstract: This article proposes a temperature compensation scheme for MEMS resonant accelerometer (MRA) based on multimode decoupling. The frequency changes of the first-order and second-order modes ...
Abstract: Resonant micro-electromechanical system (MEMS) beam accelerometers have demonstrated remarkable sensitivity and stability, enabling applications in seismology and gravimetry while keeping a ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback