In this study, the TiNbTaZr (TNTZ) alloys, which do not contain toxic and allergic elements, have been coated with hard ZrN physical vapor deposition (PVD) coatings to increase their in-vitro ...

As one of promising metal gate materials, PVD TiN has widely been studied for conventional bulk-planar CMOS devices due to its high purity [1, 2]. However, there have been no systematical studies ...